Horiba Jobin Yvon - Thin Film Analysis

Spectroscopic Ellipsometers


UVISEL - Spectroscopic Ellipsometer from FUV to NIR

The UVISEL Spectroscopic Phase Modulated Ellipsometer (SPME) is a unique instrument that incorporates photoelastic device to modulate the polarization without any mechanical movement. Owing to the phase modulation technology the UVISEL spectroscopic ellipsometer performs advanced measurements of the degree of polarization, anisotropy and Mueller Matrix elements.

  • High End Research Spectrometer
  • Spectroscopic Phase Modulated Ellipsometer
  • Highest precision and sensitivity
  • Wide spectral range : 190 to 2100 nm
  • Fully integrated spectroscopic ellipsometry software package
  • Four configurations: Extended Range, VIS, FUV, NIR

MM-16 Spectroscopic Ellipsometer
Spectral range: 430 - 850 nm

The MM-16 is a competitively priced spectroscopic ellipsometer that uses liquid crystal modulators to modulate the polarization without any mechanical movement. This technology provides an ellipsometer that is very fast, very accurate, very compact and very simple to operate.

  • A complete turnkey system
  • Liquid crystal modulation ellipsometer
  • Provides classical ellipsometric data and the full 16-element Mueller Matrix in < 2 seconds in one measurement
  • Enhanced application capability for the characterization of depolarizing and anisotropic samples
  • Modular Design and competitive price

 

UVISEL2
Spectroscopic Phase Modulation Ellipsometry
High resolution scanning monochromator

The new UVISEL2 ellipsometer offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.

Highest modulation frequency in the market (50 kHz)

Benefits:

  • The best signal to noise ratio
  • The most sensitive ellipsometer
  • No moving parts during the acquisition
  • No dead spots when ? is close to 0? and 180?
  • The only achromatic microspots in the market
  • No lenses used only mirrors
  • Largest spectral range with the microspot
  • Smallest spot size
  • Automatic selection of 8 spot sizes
  • Unique vision capabilities in the Market
  • The fastest acquition time with high spectral resolution
  • Materials Characterization from 190-2100nm
  • Optimized detections
  • PMT detection system for high sensitivity in FUV

Auto SE
Innovative Thin Film Measurement Tool

The Auto SE is a new thin film measurement tool that allows full automatic analysis of thin film samples with simple push button operation.

Sample analysis takes only a few seconds and provides a complete report that fully describes the thin film stack – including film thicknesses, optical constants, surface roughness, and film inhomogeneities.

The Auto SE is a highly featured instrument that includes an automatic XYZ stage, real-time imaging of the measurement site and automatic selection of spot size. Many accessories are available to suit a large range of applications.

The Auto SE includes built-in diagnostic indicators for the automatic detection and diagnosis of problems, with comprehensive operator guidance for troubleshooting.

The Auto SE stands out in its ease of use and numerous automatic features that made the Auto SE a turnkey instrument ideal for routine thin film measurement and device quality control.

Smart SE

Horiba Jobin Yvon's economical alternative to the Auto SE.

  • Fast and Accurate:
    • The CCD detector of the Smart-SE acquires accurate ellipsometric data from 450 nm to 1000 nm in less than 1 second
  • Flexible:
    • The optical head of the Smart-SE are mounted on a compact manual angle of incidence that allows data acquisition from 35o to 90o by step of 5o
    • Fixed Sample holder
  • Versatile:
    • The Smart-SE can be upgraded with: 200 mm or 300 mm mapping stage for uniformity measurements Automated variable angle of incidence for complex analysis In-situ configuration for real time process monitoring

 

In-Situ Ellipsometers


MM-16 - In-Situ Spectroscopic Ellipsometer
Spectral Range: 430 - 850 nm

Because the MM-16 spectroscopic ellipsometer uses CCD detection, it is very well adapted to in-situ process monitoring and control applications. The MM-16 in-situ spectroscopic ellipsometer ensures accurate real-time calculation of the thickness and optical constants of deposited or etched layers.

  • Accurate thickness and optical constants monitoring
  • Easy to mount onto a process chamber
  • Simple to operate
  • Simple integration into the HORIBA Jobin Yvon multi-sensor platform

 

Fully Automated Ellipsometers for Semiconductor Industry


UT-300 - Automatic Spectroscopic Ellipsometer
Spectral range: 190 - 830 nm

The UT-300 - Fully Automatic Spectroscopic Ellipsometer is specially developed to provide specific process control solutions for the semiconductor industry. Equipped with achromatic microspot optics, wafer handling system, autofocus and pattern recognition software the UT-300 provides unique capabilities for analyzing demanding thin film structures at a throughput in excess of 100 wafers/hour. The instrument has a far-UV option (190 nm) and is compatible with 6", 8" and 12" wafers.

  • Highest accuracy and precision
  • 30 mm achromatic microspot
  • DUV 190 nm range
  • Advanced automation features
  • Designed for advanced thin film characterization

 

Large Area Metrology Platforms for Display Industry


FF-1000 - Automatic Spectroscopic Ellipsometer
Spectral range: 190 - 830 nm

The FF-1000 automatic spectroscopic ellipsometer was specifically designed for the display industry and is able to handle up to 5th generation glass substrate. The FF-1000 allows accurate and fast characterization of thickness, optical constants and uniformity for advanced display device applications. It also supports production processes for next generation FPDs such as low-temperature polysilicon in TFT (Thin Film Transistors) and organic EL (Organic Electro Luminescence) processes.

  • Highest accuracy for display applications
  • Up to 5th flat panel display substrate
  • Advanced automation features
  • Optional spectroscopic reflectometer
  • Integrated software platform

DigiScreen - Spectroscopic Reflectometer Platform
Spectral Range 400 - 800 nm

The DIGISCREEN is an automated Spectroscopic Reflectometer platform ideally suited for R&D and pilot production of flat panel displays. Its unique compact design provides a sample holder almost vertical allowing easier integration and a smaller footprint and is able to handle up to 7th generation substrates.

  • Automated UV-VIS spectroscopic reflectometer platform ideally suited for R&D and pilot production of flat panel displays
  • Up to 7th generation flat panel display substrates
  • Unique vertical design
  • Fast film thickness uniformity mapping
  • Simple automatic operations

Other models or configurations may be available. Please contact us with your application reqirements.

News & Announcements

  • IMPORTANT UPDATE! The workshop has been moved to November 30 to December 1

    SIRIM, in cooperation with Horiba Scientific are holding a workshop, "Photoluminescence of Sol-Gel Derived Materials and Optical Fibers for Photonic Applications." Read More...

Get in touch with us!

ALV Technologies Sdn Bhd
Unit A-6(1), 6th Floor, Excella Business Park, Jalan Ampang Putra, Taman Ampang Hilir,
55100 Kuala Lumpur, Malaysia.

Tel :+603 - 4270 5386
Fax : +603 - 4270 4386
malaysia@analytical-online.com